Micro-hermetic packaging of optical devices

Details Micro-hermetic packaging of optical devices Micro-hermetic packaging of optical devices

2006-01-03

2006-01-03

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

With disengagable mechanical connector

Optical fiber to a nonfiber optical device connector

Reexamination Certificate

active

06981806

ABSTRACT:
A method for micro-hermetic packaging of an optical device comprises: forming a micro-hermetic cavity on a substrate; providing a transmission optical waveguide transferring optical power between the interior and the exterior of the micro-hermetic cavity; fabricating or mounting at least one optical device within the micro-hermetic cavity; enabling optical power transfer between the optical device and the transmission optical waveguide; and sealing the optical device within the micro-hermetic cavity. The micro-hermetic cavity may be fabricated of a size comparable to the optical device, and many such cavities may be simultaneously fabricated on a single substrate using wafer-scale processing. The transmission optical waveguide, electrical feed-throughs, and/or other monitoring/controlling components may be provided with the micro-hermetic cavity on the same substrate, or as a separate component and/or on a separate substrate. Alternatively, the optical device, transmission optical waveguide, and any other associated components may be embedded in transparent material for hermetic sealing.

REFERENCES:
patent: 5123070 (1992-06-01), Bradley
patent: 5737467 (1998-04-01), Kato et al.
patent: 6028497 (2000-02-01), Allen et al.
patent: 6238100 (2001-05-01), Sasaki et al.
patent: 6400009 (2002-06-01), Bishop et al.
patent: 2003/0081902 (2003-05-01), Blauvelt et al.
patent: 2003/0219192 (2003-11-01), Crafts et al.
patent: 2004/0161186 (2004-08-01), Crafts et al.

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