Micro gas sensor and method for manufacturing the same

Details Micro gas sensor and method for manufacturing the same Micro gas sensor and method for manufacturing the same

2011-06-21

2011-06-21

Caputo, Lisa M (Department: 2855)

Measuring and testing

Gas analysis

Detector detail

C073S025010, C073S025050

Reexamination Certificate

active

07963147

ABSTRACT:
Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.

REFERENCES:
patent: 4849050 (1989-07-01), Evans et al.
patent: 5019885 (1991-05-01), Yagawara et al.
patent: 5907765 (1999-05-01), Lescouzeres et al.
patent: 6161421 (2000-12-01), Fang et al.
patent: 6582987 (2003-06-01), Jun et al.
patent: 6896780 (2005-05-01), Yang et al.
patent: 6906392 (2005-06-01), Benzel et al.
patent: 7276745 (2007-10-01), Nakagawa et al.
patent: 2008/0264146 (2008-10-01), Roesch et al.
patent: 2009/0151429 (2009-06-01), Jun et al.
patent: 62095454 (1987-05-01), None
patent: 07-092123 (1995-04-01), None
patent: 2002-286675 (2002-10-01), None
patent: 2001-0019419 (2001-03-01), None
patent: 2006-0076922 (2006-07-01), None
patent: WO2006077197 (2006-07-01), None
“Micromechanical Devices and Fabrication.” S. F. Bart and M. W. Judy (ed.). Wiley Encyclopedia of Electrical and Electronics Engineering. 1999. pp. 648-655.
“Resistance Heating.” J. Spannhake, A. Helwig, A. Friedberger, G. Muller, W. Hellmich (ed.). Wiley Encyclopedia of Electrical and Electronics Engineering. Posted Online Jun. 15, 2007. pp. 1-12.
C. Liu and Y.-C. Tai. “Sealing of Micromachined Cavities Using Chemical Vapor Deposition Methods: Characterization and Optimization.” IEEE Journal of Microelectromechanical Systems. vol. 8. No. 2. Jun. 1999. pp. 135-145.

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