Micro-fluidic structure

Details Micro-fluidic structure Micro-fluidic structure

2011-04-19

2011-04-19

Fulk, Steven J (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C438S745000, C257SE21215

Reexamination Certificate

active

07928520

ABSTRACT:
A microfabricated structure that includes a first layer of material on a substrate, and a second layer of material over the first layer that forms an encapsulated cavity, and a structural support layer added to the second layer. Openings can be formed in the cavity, and the cavities can be layered side by side, vertically stacked with interconnections via the openings, and a combination of both can be used to construct stacked arrays with interconnections throughout.

REFERENCES:
patent: 6936494 (2005-08-01), Cheung
patent: 7145213 (2006-12-01), Ebel et al.
patent: 2002/0072243 (2002-06-01), Craighead et al.
patent: 2003/0183916 (2003-10-01), Heck et al.
patent: 2004/0110322 (2004-06-01), Hougham et al.
patent: 2005/0048688 (2005-03-01), Patel et al.
patent: 2007/0023851 (2007-02-01), Hartzell et al.

Affiliated with

Also associated with

Rating

Micro-fluidic structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-fluidic structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-fluidic structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2729976