Micro-fabricated electron multipliers

Electric lamp and discharge devices – Photosensitive – Photomultiplier

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Details

313103R, 313103CM, H01J 4304

Patent

active

055680135

ABSTRACT:
A micromachined electron multiplier is disclosed wherein a substrate has at least one trench formed therein and an aperture cover is disposed on the substrate with at least one inlet aperture aligned with one end of the channel. Either the substrate or the apertured cover may have an outlet aperture formed therein. A variety of channel shapes, and arrays are disclosed as well as a solid state photomultiplier tube formed with an integrated radiation window and anode structure.

REFERENCES:
patent: 3244922 (1966-04-01), Wolfgang
patent: 4025813 (1977-05-01), Eschard et al.
patent: 4095132 (1978-06-01), Fraioli
patent: 4757229 (1988-07-01), Schmidt et al.
patent: 5086248 (1992-02-01), Horton et al.

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