Micro-fabricated device with thermoelectric device and...

Details Micro-fabricated device with thermoelectric device and... Micro-fabricated device with thermoelectric device and...

2007-04-17

2007-04-17

Owens, Douglas W. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Thermoelectric cooling

C062S003200

Reexamination Certificate

active

10353632

ABSTRACT:
A micro-fabricated device, includes a support structure having an aperture formed therein, and a device substrate disposed within the aperture. The micro-fabricated device further includes a thermally isolating structure thermally coupling the device substrate to the support structure. The thermally isolating structure includes at least one n-doped region and at least one p-doped region formed on or in the thermally isolating structure and separated from each other. In addition, the thermally isolating structure includes an electrical interconnect connecting at least one n-doped region and at least one p-doped region, forming an integrated thermoelectric device.

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