Micro etching system using laser ablation

Details Micro etching system using laser ablation Micro etching system using laser ablation

1997-09-17

2000-03-07

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912182, B23K 2600

Patent

active

060343486

ABSTRACT:
A micro etching system using laser ablation includes a laser generator, an optical fiber waveguide, a laser beam focusing device and a sample platform. The laser generator generates an ultraviolet beam, and the optical fiber waveguide carries the laser beam radiated from the laser generator to the material to be etched. The focusing device is provided between the laser generator and optical fiber waveguide and serves to concentrate the laser beam into the optical fiber. The sample platform controls the position of the material to be etched so that the material is etched at a predetermined angle by the beam emitted from the outlet of the optical fiber waveguide.

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