Fluid handling – Processes – Cleaning – repairing – or assembling
Reexamination Certificate
2007-03-27
2007-03-27
Lee, Kevin (Department: 3753)
Fluid handling
Processes
Cleaning, repairing, or assembling
C137S240000
Reexamination Certificate
active
10733761
ABSTRACT:
Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.
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Zdunek Alan
Znamensky Dmitry
American Air Liquide, inc.
Cronin Christopher J.
Lee Kevin
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