Micro-electromechanical system (MEMS) trampoline...

Details Micro-electromechanical system (MEMS) trampoline... Micro-electromechanical system (MEMS) trampoline...

2006-05-16

2009-06-30

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S262000, C200S181000

Reexamination Certificate

active

07554421

ABSTRACT:
A micro-electromechanical device includes an actuation electrode and a suspended electrode. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode. The suspended electrode includes support members and a plate member. Each of the support members is clamped at either end to the substrate via anchors and the plate member is supported by the support members. The support members are flexible in response to an actuation voltage that is applied between the actuation electrode and the suspended electrode to allow the suspended electrode to electrostatically pull towards the actuation electrode. A signal line is coupled to the suspended electrode.

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