Micro-electromechanical system (MEMS) switch

Details Micro-electromechanical system (MEMS) switch Micro-electromechanical system (MEMS) switch

2005-12-22

2009-10-13

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S262000, C200S181000

Reexamination Certificate

active

07602261

ABSTRACT:
An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.

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