Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With coupling means
Reexamination Certificate
2007-05-22
2007-05-22
Tang, Minh N. (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With coupling means
C324S11700H
Reexamination Certificate
active
11289910
ABSTRACT:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
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Berkcan Ertugrul
Chandrasekaran Shankar
Claydon Glenn Scott
Jones Debbie Gahaton
Kapusta Christopher James
General Electric Company
Klindtworth Jason K.
Tang Minh N.
Testa Jean K.
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