Micro electromechanical switches

Details Micro electromechanical switches Micro electromechanical switches

2005-08-16

2005-08-16

Jackson, Stephen W. (Department: 2836)

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

C361S154000, C361S160000

Reexamination Certificate

active

06930873

ABSTRACT:
Characteristics of micro electromechanical switches can be changed by applying a control signal which either changes one or more parameters of the micro electromechanical switches or which controls beam movement by feedback signals. It is thereby possible to change switching transient time, maximum switching frequency, power tolerance, and/or sensitivity (actuation voltage) of a micro electromechanical switch.

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IEEEJournal of Microelectromechanical Systems, Jun. 1999, vol. 8, No. 2, pp. 129-134, ISSN 1057-7157 , Z. Jamie Yao et al., “Micromachined Low-Loss Microwave Switches”.
IEEETransactions on Microwave Theory and Techniques, Nov. 1998, vol. 46, No. 11, pp. 1868-1880, ISSN 0018-9480, Elliott R. Brown, “RF-MEMS Switches for Reconfigurable Integrated Circuits”.

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