Micro-electromechanical switched tunable inductor

Details Micro-electromechanical switched tunable inductor Micro-electromechanical switched tunable inductor

2007-12-06

2010-12-07

Enad, Elvin G (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C336S223000, C336S232000, C336S146000, C336S222000, C336S087000, C361S272000, C361S287000

Reexamination Certificate

active

07847669

ABSTRACT:
Disclosed is an integrated tunable inductor having mutual micromachined inductances fabricated in close proximity to a tunable inductor that is switched in and out by micromechanical ohmic switches to change the inductance of the integrated tunable inductor. To achieve a large tuning range and high quality factor, silver is preferably used as the structural material to co-fabricate the inductors and micromachined switches, and silicon is selectively removed from the backside of the substrate. Using this method, exemplary tuning of 47% at 6 GHz is achievable for a 1.1 nH silver inductor fabricated on a low-loss polymer membrane. The effect of the quality factor on the tuning characteristic of the integrated inductor is evaluated by comparing the measured result of substantially identical inductors fabricated on various substrates. To maintain the quality factor of the silver inductor, the device may be encapsulated using a low-cost wafer-level polymer packaging technique.

REFERENCES:
patent: 4249262 (1981-02-01), Fenk
patent: 5578976 (1996-11-01), Yao
patent: 5872489 (1999-02-01), Chang et al.
patent: 5959516 (1999-09-01), Chang et al.
patent: 6232847 (2001-05-01), Marcy et al.
patent: 6549096 (2003-04-01), Groves et al.
patent: 6573822 (2003-06-01), Ma et al.
patent: 6768628 (2004-07-01), Harris et al.
patent: 6800912 (2004-10-01), Ozgur
patent: 6977569 (2005-12-01), Deligianni et al.
patent: 7042319 (2006-05-01), Ishiwata et al.
patent: 7091784 (2006-08-01), Terrovitis
patent: 7598838 (2009-10-01), Hargrove et al.
patent: 2002/0190835 (2002-12-01), Ma et al.
patent: 2003/0030527 (2003-02-01), Mhani et al.
patent: 2003/0060051 (2003-03-01), Kretschmann et al.
patent: 2003/0099082 (2003-05-01), Tuo et al.
patent: 2003/0122207 (2003-07-01), Yen et al.
patent: 2004/0100341 (2004-05-01), Luetzelschwab et al.
patent: 2005/0068146 (2005-03-01), Jessie
patent: 2006/0115919 (2006-06-01), Gogoi et al.
patent: 2006/0290450 (2006-12-01), Weller et al.
patent: 2006/0290457 (2006-12-01), Lee et al.
patent: 2007/0273013 (2007-11-01), Kohl et al.
James Salvia et al, “Tunable on-Chip Inductors up to 5 GHz using patterned permalloy Laminations,”Dec. 2005 IEEE IEDM, pp. 943-946.
Shih et al, “Tunable solenoid microinductors utilizing Permalloy electro-thermal vibromotors,” Sep. 2004 IEEE MEMS, pp. 793-796.
C. M. Tassetti et al., “Tunable RF MEMS microinductors for future communication systems,” Sep. 2003 IEEE MTT-S, vol. 3, pp. 541-545.
I. Zine-El-Abidine et al., “RF MEMS tunable inductor,” 2004 IEEE Microwaves, Radar and Wireless Corn., vol. 3, pp. 817-819, May 2004.
P. Monajemi et al, “A Low-cost Wafer-level Packaging Technology,” 2005 IEEE MEMS, Jan. 2005, pp. 634-637.
M. Rais-Zadeh et al, “High-Q Micromachined Silver Passives and Filters,” accepted to IEEE IEDM, Dec. 2006.
M. Rais-Zadeh et al., “Characterization of high-Q sprial inductors on thick insulator-on-silicon” J. of Micromechanics and Microengineering (Sep. 2005) vol. 15 pp. 2105-2112.
M. Raieszadeh et al., “High-Q integrated inductors on trenched Si islands” Proc. of IEEE MEMS Conf. (Jan. 2005) pp. 199-202.
R. Manepalli et al., “Silver metallization for advanced interconnects” IEEE Trans. Advanced Packaging (Feb. 1999) vol. 22 No. 1 pp. 4-8.

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