Micro electromechanical switch and method of manufacturing...

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

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C200S181000

Reexamination Certificate

active

07463126

ABSTRACT:
A micro electromechanical relay opens and closes an electrical circuit by contact/separation between a fixed contact disposed on a base and a movable contact disposed on an actuator by driving of a movable electrode by electrostatic attraction by application of voltage between a fixed electrode disposed on the base and a movable electrode of the actuator. The actuator comprises a supporting portion disposed on the base, a beam portion extending in a cantilevered manner from the supporting portion, and a movable electrode and a movable contact elastically supported by the beam portion. The beam portion elastically supports, in order from the supporting portion end, the movable electrode and the movable contact. A slit is formed from the side of the supporting portion in the portion of the actuator connecting the beam portion and the movable electrode.

REFERENCES:
patent: 6115231 (2000-09-01), Shirakawa
patent: 6628183 (2003-09-01), Kang et al.
patent: 6847277 (2005-01-01), Hsu et al.
patent: 2002/0005341 (2002-01-01), Seki
patent: 42 05 029 (1993-02-01), None
patent: 42 05 340 (1993-05-01), None
patent: 0 520 407 (1992-12-01), None
patent: 11-111146 (1999-04-01), None
patent: 11-134998 (1999-05-01), None
patent: WO-99/62089 (2000-12-01), None
Patent Abstracts of Japan; Publication No. 11-111146; Date of publication: Apr. 23, 1999.
Patent Abstracts of Japan; Publication No. 11-134998; Date of publication: May 21, 1999.
Extended European Search Report; dated Jun. 28, 2006; in application No. 06111126.6 (7 pages).
Sakata, Minoru; “An Electrostatic Microactuator for Electro-Mechanical Relay”; Proceedings IEEE Micro Electro Mechanical Systems; Feb. 20, 1989 (3 pages).

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