Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate
2007-12-25
2007-12-25
Enad, Elvin (Department: 2832)
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
C200S181000
Reexamination Certificate
active
11028620
ABSTRACT:
The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
REFERENCES:
patent: 4423401 (1983-12-01), Mueller
patent: 5258591 (1993-11-01), Buck
patent: 5578976 (1996-11-01), Yao
patent: 5955817 (1999-09-01), Dhuler et al.
patent: 6239685 (2001-05-01), Albrecht et al.
patent: 6275320 (2001-08-01), Dhuler et al.
patent: 6456190 (2002-09-01), Andersson et al.
patent: 6549107 (2003-04-01), Lim et al.
patent: 6570750 (2003-05-01), Calcatera et al.
patent: 6684638 (2004-02-01), Quenzer et al.
patent: 6753582 (2004-06-01), Ma
patent: 6801682 (2004-10-01), Zhang et al.
patent: 6977569 (2005-12-01), Deligianni et al.
patent: 7092272 (2006-08-01), Gilkey et al.
William C. Tang, Tu-Cuong H. Nguyen and Roger T. Howe: “Laterally Driven Polysilicon Resonant Microstructures”; Proceedings of IEEE.
Micro Electro Mechanical Systems, Feb. 1989; p. 53-59.
Yongxun Liu et al: “A Thermomechanical Relay With Microspring Contact Array”; Proceedings of IEEE; 2001; p. 220-223.
Don Yan, “Mechanical Desgin and Modeling of MEMS Thermal Actuators for RF applications”, Thesis (University of Waterloo), at least as early as Dec. 2002, Waterloo, Canada.
Don Yan et al., “Design and modeling of a MEMS bidirectional vertical thermal actuator”, J. Micromech. Microeng., May 13, 2004, 841-850, 14-7, Inst. of Physics Pub., Bristol UK.
Colgan Michael John
Howey Cameron Raymond
McKinnon Graham Hugh
Ning Yuebin
Enad Elvin
Norcada Inc.
Rojas Bernard
LandOfFree
Micro-electromechanical relay does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micro-electromechanical relay, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-electromechanical relay will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3887429