Micro-electromechanical fluid ejection device having an...

Details Micro-electromechanical fluid ejection device having an... Micro-electromechanical fluid ejection device having an...

2005-06-28

2005-06-28

Nguyen, Lamson (Department: 2853)

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06910755

ABSTRACT:
A micro-electromechanical fluid ejection device includes a substrate. A semiconductor layer is positioned on the substrate. The substrate and the semiconductor layer define a fluid inlet chamber. A nozzle chamber defining structure is positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet chamber and a fluid ejection port in fluid communication with the nozzle chamber. An actuator is fixed, at one end, to the substrate. The actuator incorporates a heating circuit electrically connected to the semiconductor layer. The heating circuit is configured to generate thermal differential expansion and contraction upon excitation and de-excitation by the semiconductor layer so that the actuator is cyclically displaced relative to the substrate. A fluid ejection member is fixed to an opposite end of the actuator and positioned with respect to the nozzle chamber so that resultant displacement of the fluid ejection member causes fluid to be ejected from the fluid ejection port. A movement sensor is positioned on the actuator to determine an extent of movement of the actuator.

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patent: WO 99/03680 (1999-01-01), None
patent: WO 99/03681 (1999-01-01), None

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