Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2006-06-27
2006-06-27
Meier, Stephen (Department: 2853)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
C347S065000
Reexamination Certificate
active
07066575
ABSTRACT:
A micro-electromechanical fluid ejection device includes a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer. A nozzle chamber structure is positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel and a fluid ejection port in fluid communication with the nozzle chamber. The nozzle chamber structure incorporates a fluid ejecting member that is displaceable with respect to the substrate to act on fluid in the nozzle chamber to eject the fluid from the fluid ejection port. An elongate actuator arm is connected at one end to the substrate and at an opposite end to the fluid ejecting member. The arm has an active beam assembly and a passive beam assembly spaced from and parallel to the active beam assembly. The beam assemblies are mechanically connected, but electrically isolated from each other. The active beam assembly defines an electrical heating circuit connected to the CMOS layers and capable of thermal expansion so that the arm experiences differential thermal expansion to be displaced with respect to the substrate thus displacing the fluid ejecting member. A spacing between the active beam assembly and the passive beam assembly is between one percent and twenty percent of a length of the actuator arm.
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