Micro-electromechanical displacement device

Details Micro-electromechanical displacement device Micro-electromechanical displacement device

2006-01-10

2006-01-10

Stephens, Juanita D. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S065000

Reexamination Certificate

active

06984023

ABSTRACT:
A micro-electromechanical displacement device includes a wafer substrate that incorporates drive circuitry. A thermal actuator is fast, at one end, with the wafer substrate, while the other end is fast with a component to be displaced. The thermal actuator has a pair of activating members of a material having a coefficient of thermal expansion which is such that the material is capable of performing work when heated. One of the activating members is connected to the drive circuitry layer to be heated on receipt of a signal from the drive circuitry layer so that said one of the activating members expands to a greater extent than the remaining activating member, resulting in displacement of the actuator arm. A gap is defined between the activating members.

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patent: WO 99/03681 (1999-01-01), None

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