Micro-electromechanical devices and methods of fabricating...

Details Micro-electromechanical devices and methods of fabricating... Micro-electromechanical devices and methods of fabricating...

2004-04-23

2009-10-06

Trinh, Minh (Department: 3729)

Metal working

Piezoelectric device making

C029S025420, C029S594000, C029S602100, C029S840000, C029S845000, C310S31300R, C310S358000

Reexamination Certificate

active

07596841

ABSTRACT:
An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.

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