Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Patent
1999-02-24
2000-10-03
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
216 52, 438 52, H02N 1000, H01L 21302, B44C 122
Patent
active
061277657
ABSTRACT:
A micro-electromechanical device, such as a micro-sensor or micromachine, includes a movable part in the form of a cantilever or diaphragm, which is formed on a substrate. In order to recover stiction in which the movable part is fixedly adhered to the substrate, a heating element is provided on a surface of the substrate which is opposed to the movable part. The heating element can be operated upon occurrence of stiction, so as to generate heat and thereby separate the movable part from the substrate and assure a proper operation of the device. The device can be produced at a relatively low cost, and achieves a stiction recovery with a high reliability, even when the device is enclosed in a package.
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Kazuyoshi Fushinobu, et al., Thermal Analysis of Silicon Films with Ultrashort-Pulse Laser Irradiation, Transactions of the Japan Society of Mechanical Engineers, May 1997.
K. Fushinobu, et al., Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion, Int. J. Heat Mass Transfer., vol. 39, No. 15, pp. 3181-3186, 1996.
N.C. Tien, et al., Surface adhesion reduction in silicon microstructures using femtosecond laser pulses, Appl. Phys. Lett. 68(2), Jan. 8, 1996.
Dougherty Thomas M.
Tokyo Institute of Technology
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