Micro-electromechanical actuators

Details Micro-electromechanical actuators Micro-electromechanical actuators

2006-01-17

2006-01-17

Donovan, Lincoln (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

06987435

ABSTRACT:
The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

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1998 Elsevier Science S.A., “Numerical simulation and optimization of planar electromagnetic actuators”, A. Feustel, et al., 7 pages.

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