Micro-electromechanical actuator that includes drive circuitry

Details Micro-electromechanical actuator that includes drive circuitry Micro-electromechanical actuator that includes drive circuitry

2006-04-25

2006-04-25

Do, An H. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S065000

Reexamination Certificate

active

07032997

ABSTRACT:
A micro-electromechanical actuator includes a substrate. Register, gate and drive transistor circuitry is positioned on the substrate. An elongate actuator arm is fast, at a first end, with the substrate. The elongate actuator arm includes a mechanical layer and a heater layer interposed between the mechanical layer and the substrate. The heater layer defines a heating circuit that expands and contracts longitudinally when heated and subsequently cooled, resulting in reciprocal movement of the actuator arm away from and towards the substrate. A working member is fast with a second end of the actuator. The register, gate and drive transistor circuitry are interposed between the heater layer and the substrate.

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