Micro-Electromagnet including an integrated magnetic circuit and

Details Micro-Electromagnet including an integrated magnetic circuit and Micro-Electromagnet including an integrated magnetic circuit and

1995-12-19

1999-01-26

Lee, Kevin

Valves and valve actuation

Electrically actuated valve

251 65, 25112906, 29890124, F16K 3106

Patent

active

058630244

ABSTRACT:
An electromagnetic micro-actuator includes a coil for generating a magnetic field which acts on a movable element at least partially made of a magnetic material, and a magnetic circuit to drive the magnetic flux towards a gap closable by the motion of the movable element.

REFERENCES:
patent: 5058856 (1991-10-01), Gordone t al.
patent: 5096643 (1992-03-01), Kowanz et al.
patent: 5238223 (1993-08-01), Mettner et al.
patent: 5322258 (1994-06-01), Bosch et al.
patent: 5351934 (1994-10-01), Jensen et al.
Article entitled "A Planar Micromachined Spiral Inductor for Integrated Magnetic Microactuator Applications" by Chong Ahn and Mark G. Allen.
Article: "Microfabricated Actuator with Moving Permanent magnet" by B. Wagner, W. Benecke.
Article: "Sensors and Actuators A Physical" by Elsevier Science S.A.
Patent PCT/DE93/00494--Title: "Microvalve" by Mettner, Michael, et al.

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