Micro-electro-mechanical systems switch

Details Micro-electro-mechanical systems switch Micro-electro-mechanical systems switch

2002-02-25

2003-09-16

Nguyen, Patricia (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000, C333S258000, C333S101000, C200S181000

Reexamination Certificate

active

06621387

ABSTRACT:

BACKGROUND OF THE INVENTION
3
The invention relates to electronic switches. In particular, the invention relates to micro-electro-mechanical radio frequency (RF) switches.
SUMMARY OF THE INVENTION
The invention relates to high frequency switching of radio frequency signals. In one aspect of the invention, a micro-electro-mechanical switch includes a transmission line having a gap disposed along it. The switch also includes at least one ground plane located proximal to the transmission line. A first bridge is configured to close the gap along the transmission line, and a second bridge is configured to connect the transmission line to the ground plane.
In an additional aspect of the invention, a method of manufacturing a micro-electro-mechanical switch includes forming, on a first substrate, a transmission line and at least one ground plane, wherein the transmission line includes a gap along it. The method also includes forming, on a second substrate, a first bridge configured to close the gap disposed along the transmission line, and a second bridge configured to connect the transmission line to the ground plane. Then transferring the first and second bridges to the first substrate.
Other features and advantages of the present invention should be apparent from the following description of the preferred embodiment, which illustrates, by way of example, the principles of the invention.


REFERENCES:
patent: 5880921 (1999-03-01), Tham et al.
patent: 6133807 (2000-10-01), Akiyama et al.
patent: 6426687 (2002-07-01), Osborn
patent: 6440767 (2002-08-01), Loo et al.
patent: 6472962 (2002-10-01), Guo et al.

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