Micro electro mechanical systems device, method of...

Details Micro electro mechanical systems device, method of... Micro electro mechanical systems device, method of...

2005-11-01

2005-11-01

Barrera, Ramon M. (Department: 2832)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S900000, C257S415000, C356S454000

Reexamination Certificate

active

06961182

ABSTRACT:
A micro electro mechanical systems (MEMS) device includes a first substrate on which an electrode is formed, a movable substrate having at least a moving part and a periphery supporting member, and a second substrate having a concave portion. A space that includes a part of the concave portion is formed by jointing the first substrate, the movable substrate, and the second substrate together. The moving part inside the space moves when a voltage is applied between the electrode and the moving part through the periphery supporting member, and a part of the first substrate protrudes outside a side surface of the second substrate.

REFERENCES:
patent: 5627396 (1997-05-01), James et al.
patent: 6341039 (2002-01-01), Flanders et al.

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