Micro-electro-mechanical system (MEMS) variable capacitor...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal

Reexamination Certificate

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Details

C257S312000, C257S595000, C361S277000, C361S278000, C361S290000, C361S292000, C361S299100

Reexamination Certificate

active

06897537

ABSTRACT:
Micro-Electro-Mechanical System (MEMS) Variable Capacitor Apparatus and Related Methods. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes. The variable capacitor can also include a first conductive plate attached to and electrically isolated from the first electrode. Furthermore, the variable capacitor can include a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of voltage across the first and second electrodes to change the capacitance between the first and second plates.

REFERENCES:
patent: 6229684 (2001-05-01), Cowen et al.
patent: 6377438 (2002-04-01), Deane et al.
patent: 6701779 (2004-03-01), Volant et al.
patent: 20020131228 (2002-09-01), Potter

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