Micro-electro-mechanical-system (MEMS) resonator and...

Details Micro-electro-mechanical-system (MEMS) resonator and... Micro-electro-mechanical-system (MEMS) resonator and...

2009-12-16

2011-11-22

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S188000

Reexamination Certificate

active

08063721

ABSTRACT:
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

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patent: WO 2005/078752 (2005-08-01), None

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