Micro electro mechanical system apparatus

Details Micro electro mechanical system apparatus Micro electro mechanical system apparatus

2006-04-18

2006-04-18

Pham, Long (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

C257S414000

Reexamination Certificate

active

07030416

ABSTRACT:
A MEMS (micro electro mechanical system) apparatus is equipped with a light-emitting circuit, having a light-emitting device, to emit light; a light-receiving circuit having a series circuit of series-connected light-receiving devices that receive the emitted light to generate a voltage; and a MEMS assembly driven by the generated voltage.

REFERENCES:
patent: 5578976 (1996-11-01), Yao

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