Micro-electro mechanical switch designs

Details Micro-electro mechanical switch designs Micro-electro mechanical switch designs

2007-05-15

2007-05-15

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C200S600000

Reexamination Certificate

active

11092462

ABSTRACT:
A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.

REFERENCES:
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patent: 6625004 (2003-09-01), Musolf et al.
patent: 6646215 (2003-11-01), Nelson
patent: 6646525 (2003-11-01), Bozler et al.
patent: 7002441 (2006-02-01), Pillans et al.
patent: WO 02/079076 (2001-06-01), None
Muldavin et al., “Large Tuning Range Analog and Multi-bit MEMS Varactors” Microwave Symposium Digest, 2004 IEEE, vol. 3, pp. 1919-1922.
Muldavin et al. “Power Handling and Linearity of MEM Captacitive Series Switch” 2003 IEEE MIT-S International Symposium Digest 2003, pp. 1915-1918.
Bozler et al., “MEMS Microswitch Arrays for Reconfigurable Distributed Microwave Components” IEEE, MIT-S International Microwave Symposium Digest, 2000, vol. 1, pp. 153-156.
Pillans et al., “Advances in RF MEMS Technology” 2000 IEEE, Annual IEEE Gallium Arsenide Integrated Circuit Symposium, pp. 17-20.

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