Micro-electro-mechanical switch, and methods of making and...

Details Micro-electro-mechanical switch, and methods of making and... Micro-electro-mechanical switch, and methods of making and...

2006-02-21

2006-02-21

Enad, Elvin G. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07002441

ABSTRACT:
A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.

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U.S. Appl. No. 09/866,205, filed May 25, 2001, entitled “Membrane for Micro-Electrical-Mechanical Switch, and Methods of Making and Using It”, by inventors Shea Chen, Brandon W. Pillans, John C. Ehmke and Zhimin J. Yao, 37 pages of specification, 6 pages of drawings.
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