Micro-electro-mechanical gyroscope with open-loop reading...

Details Micro-electro-mechanical gyroscope with open-loop reading... Micro-electro-mechanical gyroscope with open-loop reading...

2008-07-02

2011-11-08

Raevis, Robert (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Angle, direction, or inclination

Reexamination Certificate

active

08051698

ABSTRACT:
A micro-electro-mechanical gyroscope includes a first mass, which is able to oscillate along a first axis with respect to a fixed body, an inertial sensor having a second mass constrained to the first mass so as to oscillate along a second axis in response to a rotation of the gyroscope, a driving device coupled to the first mass that forms a control loop for maintaining the first mass in oscillation at a resonance frequency, and a reading device that detects displacements of the second mass along the second axis, which includes a charge amplifier for converting charge packets supplied by the inertial sensor into a charge-integration signal, and a low-pass filter. A calibration stage enables modification of a voltage between the second mass and the fixed body so as to minimize a component at a frequency that is twice the resonance frequency in the charge-integration signal.

REFERENCES:
patent: 4884446 (1989-12-01), Ljung
patent: 5608351 (1997-03-01), Ward
patent: 6553833 (2003-04-01), Funk et al.
patent: 2004/0206176 (2004-10-01), Willig et al.
patent: 2007/0144255 (2007-06-01), Handrich et al.

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