Micro-electro-mechanical device and method of making

Details Micro-electro-mechanical device and method of making Micro-electro-mechanical device and method of making

2002-05-31

2004-09-21

Ghyka, Alexander (Department: 2812)

Radiation imagery chemistry: process, composition, or product th

Electric or magnetic imagery, e.g., xerography,...

Electrostatic image transfer

C438S050000, C438S052000

Reexamination Certificate

active

06794101

ABSTRACT:

FIELD OF THE INVENTION
This invention relates to electronics, in general, and to micro-electro-mechanical devices and methods of making, in particular.
BACKGROUND OF THE INVENTION
Micro-electro-mechanical devices are used for a wide range of applications. These devices or micro-switches have the advantage of providing superior switching characteristics over a wide range of frequencies. One type of micro-electro-mechanical switch structure utilizes a cantilever beam design. A cantilever beam with contact metal thereon rests above an input signal line and an output signal line. During switch operation, the beam is electro-statically actuated by applying voltage to an electrode on the cantilever beam. Electrostatic force pulls the cantilever beam toward the input signal line and the output signal line, thus creating a conduction path between the input line and the output line through the metal contact on the cantilever beam.
One disadvantage of this design is the high contact resistance of the shorting bar, which must make contact to two places, the input signal line and the output signal line. High contact resistance results in higher radio frequency (RF) power insertion loss through the signal path.
Accordingly, a need exists for a micro-electro-mechanical device with reliable mechanical and electrical contact characteristics having low contact resistance. A need also exists for a method of making the micro-electro-mechanical device.


REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 6046659 (2000-04-01), Loo et al.
patent: 6100477 (2000-08-01), Randall et al.
patent: 6310339 (2001-10-01), Hsu et al.
patent: 6396368 (2002-05-01), Chow et al.
patent: 6483056 (2002-11-01), Hyman et al.
D. Hyman & M. Mehregany, “Contact Physics of Gold Microcontacts for MEMS Switches,”IEEE: Transactions on Components and Packaging Technology, Sep. 1999, pp. 357-364.
P. Zavracky, et al., “Micromechanical Switches Fabricated Using Nickel Surface Micromachining,”IEEE: Journal of Microelectromechanical Systems, Mar., 1997, pp. 3-9.
J. Yao, et al., “A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC Up to 4GHZ,”Transducers '95—Eurosensors IX, Jun. 25-29, 1995, pp. 384-387.

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