Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-07-26
2005-07-26
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C204S192340, C204S298360, C438S712000, C310S312000
Reexamination Certificate
active
06922118
ABSTRACT:
A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
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Joyce Richard J.
Kubena Randall L.
HRL Laboratories LLC
Summons Barbara
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