Micro electrical mechanical system

Details Micro electrical mechanical system Micro electrical mechanical system

2007-11-27

2007-11-27

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S051000, C438S113000

Reexamination Certificate

active

10976452

ABSTRACT:
This disclosure relates to lids and methods for forming and using them. One embodiment of these lids enables MEMS protected by the lids to be smaller. Another of these lids enables testing of a group of conjoined, lidded MEMS. Also, processes for forming and using these lids are also disclosed. One of these processes forms lids from a lid precursor residing over an assembly MEMS.

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