Micro-displacement type information detection probe device and s

Dynamic information storage or retrieval – Specific detail of information handling portion of system – Electrical modification or sensing of storage medium

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Details

250306, 73105, 310367, 310331, 310332, G11B 900

Patent

active

052766721

ABSTRACT:
A micro-displacement type information detection probe device capable of following all of the undulation on the .mu.m order, and the periodical surface unevenness on the nm order, of the recording medium or the substrate in performing recording and/or reproduction, by use of, for example, tunnel current, is provided. By forming a cantilever of the first stage by extending the insulation layer laminated on the substrate, providing a lalyer structure having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever of the above first stage is displaced.

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Binning, et al., "Atomic Force Microscope," Physical Review Letters, vol. 56, No. 9, pp. 930-933 (Mar. 3, 1986).

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