Micro diaphragm pump

Details Micro diaphragm pump Micro diaphragm pump

1996-03-15

1998-02-17

Gluck, Richard E.

Pumps

Motor driven

Fluid motor

417479, F04B 4306

Patent

active

057185670

ABSTRACT:
In a micro diaphragm pump which has a pump body consisting of two parts, one part including two valve chambers with a pump chamber disposed therebetween and in communication with the valve chambers by passages, a diaphragm extends across and closes the chambers and forms, in the areas of the valve chambers, valve membranes for inlet and outlet valves which are integrally formed, both on one side of the diaphragm, both pump body parts being sealingly connected to the diaphragm.

REFERENCES:
patent: 2980032 (1961-04-01), Schneider
patent: 3145659 (1964-08-01), Svendsen
patent: 4895500 (1990-01-01), Hok et al.
patent: 5171132 (1992-12-01), Miyazaki et al.
patent: 5344292 (1994-09-01), Rabenau et al.
Rapp `Mit dem LIGA-Verfahren hergestelle Mikromembranpumpe`, Feb. 1993, 3. Symposium Microsystmetechnik, Regensburg, Seite 125 -126.

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