Micro device including a thin film wiring structure and...

Details Micro device including a thin film wiring structure and... Micro device including a thin film wiring structure and...

2005-11-29

2005-11-29

Evans, Jefferson (Department: 2652)

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Reexamination Certificate

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06970323

ABSTRACT:
In a micro device including a thin film wiring structure composed of plural thin film conductors, the thin film conductors are arranged on a base so as to be separated from one another by an inorganic insulating film. The gap width α between adjacent thin film conductors is defined by a thickness of the inorganic insulating film. The gap width α is set smaller than a width β of each thin film conductor.

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patent: A-2001-93113 (2001-04-01), None

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