Micro device

Details Micro device Micro device

2006-11-21

2006-11-21

Enad, Elvin (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07138893

ABSTRACT:
Resonators4and5are able to oscillate horizontally and vertically to substrate1. Resonator4is primarily composed of a supporting portion in stationary contact with substrate1, a movable portion including a contact surface making contact with resonator5and a contact surface making contact with electrode7, and a crossing portion that couples the supporting portion and movable portion. Electrode6is disposed in the direction in which resonator5is spaced apart from resonator4. Electrode7is disposed in the direction in which resonator4is spaced apart from resonator5. Electrode9is disposed in a position that causes resonator5to generate electrostatic force in a direction different from the direction of both forces of attraction acting between resonators4and5and between resonator5and electrode6.

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