Micro corner cube array, method of making the micro corner...

Details Micro corner cube array, method of making the micro corner... Micro corner cube array, method of making the micro corner...

2008-04-22

2008-04-22

Phan, James (Department: 2872)

Optical: systems and elements

Signal reflector

3-corner retroreflective

C349S113000

Reexamination Certificate

active

11489506

ABSTRACT:
A method of making a micro corner cube array includes the steps of: providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate. Each of the unit elements is made up of a number of crystal planes that have been etched at a lower etch rate than the {111} planes of the crystals.

REFERENCES:
patent: 3765969 (1973-10-01), Kragness et al.
patent: 3905682 (1975-09-01), Meyerbhofer
patent: 4066331 (1978-01-01), Lindner
patent: 4526439 (1985-07-01), Okoshi et al.
patent: 4703999 (1987-11-01), Benson
patent: 4992699 (1991-02-01), McClure et al.
patent: 5132823 (1992-07-01), Kamath et al.
patent: 5182663 (1993-01-01), Jones
patent: 5346581 (1994-09-01), Tsang
patent: 6010223 (2000-01-01), Gubela, Sr.
patent: 6461003 (2002-10-01), Neudeck
patent: 6788366 (2004-09-01), Sawayama et al.
patent: 6819507 (2004-11-01), Minoura et al.
patent: 7098137 (2006-08-01), Ihara et al.
patent: 7098976 (2006-08-01), Minoura et al.
patent: 2001/0040717 (2001-11-01), Minoura et al.
patent: 2002/0154408 (2002-10-01), Minoura et al.
patent: 2003/0053015 (2003-03-01), Minoura et al.
patent: 54-105998 (1979-08-01), None
patent: 02-181923 (1990-07-01), None
patent: 3-186816 (1991-08-01), None
patent: 7-205322 (1995-08-01), None
patent: 8-321483 (1996-12-01), None
patent: 9-076245 (1997-03-01), None
patent: 10-206611 (1998-08-01), None
patent: 11-007008 (1999-01-01), None
patent: 2000-019490 (2000-01-01), None
patent: 2000-221497 (2000-08-01), None
patent: 2001-013310 (2001-01-01), None
patent: 98/56966 (1998-12-01), None
patent: 98/57212 (1998-12-01), None
“Integrated Circuit Fabrication Technology”, Elliott, McGraw-Hill Book Company, pp. 248-251.
“Optimization of the Hydrazine-Water Solution for Anisotropic Etching of Silicon in Integrated Circuit Technology”, Declercq et al., Stanford Electronics Laboratories, p. 545.
U.S. Appl. No. 10/315,192, filed Dec. 10, 2002.
Kaneko, Control of Atomic Arrangement by Inverse Epitaxy (Semiconductor Atomic Layer Process by On-the-Spot Etching Technique), “Reports of Research and Development Results in 1998 Academic Research Backup Project”, Published by Hyogo Science and Technology Association, Nov. 1999 and partial English translation thereof.
Chinese Office Action and English translation thereof, mailed May 28, 2004 in corresponding Chinese Application No. 02157421.9.
U.S. Appl. No. 10/171,651, filed Jun. 17, 2002.
U.S. Appl. No. 09/821,686, filed Mar. 30, 2001.
Neudeck, G. et al; “Precision Crystal Corner Cube Arrays for Optical Gratings Formed by (100) Silicon Planes With Selective Epitaxial Growth”; Applied Optics, vol. 35, No. 19, Jul. 1, 1996, pp. 3466-3470.
Japanese Office Action issued Dec. 27, 2005 (w/English translation thereof).

Affiliated with

Also associated with

Rating

Micro corner cube array, method of making the micro corner... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro corner cube array, method of making the micro corner..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro corner cube array, method of making the micro corner... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3917578