Micro corner cube array, method of making the micro corner...

Details Micro corner cube array, method of making the micro corner... Micro corner cube array, method of making the micro corner...

2008-04-22

2008-04-22

Phan, James (Department: 2872)

Optical: systems and elements

Signal reflector

3-corner retroreflective

C349S113000

Reexamination Certificate

active

07360907

ABSTRACT:
A method of making a micro corner cube array includes the steps of: providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate. Each of the unit elements is made up of a number of crystal planes that have been etched at a lower etch rate than the {111} planes of the crystals.

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