Fluid handling – Processes – Cleaning – repairing – or assembling
Patent
1996-05-07
1999-12-21
Walton, George L.
Fluid handling
Processes
Cleaning, repairing, or assembling
251122, 25112911, 251205, 251267, 2513353, F16K 3104, F16K 102
Patent
active
060035358
ABSTRACT:
An improved continuously variable micro control valve and an apparatus and a method employing the same for making semiconductors enable a computer to precisely set a driver of the micro control valve such that the accuracy of the control valve in reproducing a flow value for a given setting of the driver is at least 1/1000 of a maximum flow value for a relatively wide range of flow values which can be provided by the micro control valve. The relatively wide range of flow values is at least 1000 to 1 in a disclosed embodiment with a resolution sensitivity of the micro control valve being at least 1/10,000 of the full scale of the relatively wide range of flow values. The improvement in repeatability and accuracy afforded by the micro control valve can result in higher yields in semiconductor making.
REFERENCES:
patent: 3727406 (1973-04-01), LeFeuvre
patent: 4556193 (1985-12-01), Yoshiga
patent: 4593881 (1986-06-01), Yoshino
patent: 4609176 (1986-09-01), Powers
patent: 4763874 (1988-08-01), Ogawa
patent: 4815699 (1989-03-01), Mueller
patent: 4986085 (1991-01-01), Tischer
Veriflo Corporation
Walton George L.
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