Radiant energy – Irradiation of objects or material
Reexamination Certificate
2008-05-20
2008-05-20
Vanore, David A. (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492200, C310S309000, C310S328000
Reexamination Certificate
active
07375351
ABSTRACT:
Provided is a micro-column electron beam apparatus including: a base; an electron lens bracket on which an electron lens module can be fixed, mounted in a central portion of the base; an electron beam source tip module vertically disposed on the electron lens module; a pan spring plate stage module that is mounted over the base, supports the electron beam source tip module at a central portion thereof, and includes a three-coupling pan spring plate portion including first through third spring units that are coupled to the electron beam source tip module in three directions on a plane perpendicular to the vertical axis, which vertically passes the center of the electron beam source tip module, to elastically support the electron beam source tip module in three directions; a first piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a first axis perpendicular to the vertical axis; and a second piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a second axis perpendicular to the vertical axis and the first axis.
REFERENCES:
patent: 6023060 (2000-02-01), Chang et al.
patent: 6555829 (2003-04-01), Spallas et al.
patent: 2001 330425 (2001-11-01), None
patent: 2003 215014 (2003-07-01), None
Choi Sang Kuk
Jeong Jin Woo
Kim Dae Jun
Kim Dae Yong
Electronics and Telecommunications Research Instutute
Johnston Phillip A.
Ladas & Parry LLP
Vanore David A.
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