Micro cilia array and use thereof

Details Micro cilia array and use thereof Micro cilia array and use thereof

1998-07-10

2000-04-04

Nguyen, Hoang

Power plants

Motor operated by expansion and/or contraction of a unit of...

Mass is a solid

60529, F01B 2910

Patent

active

060446463

ABSTRACT:
A micromechanical actuator having the ability to move in two directions. The actuator can be manufactured in planar arrays using semiconductor manufacturing equipment. The planar array of actuators can be used as a microcillia array.
The actuators are formed from two layers of electrically resistive material which are used to heat a non-conductive material which has a high coefficient of thermal expansion. The pattern of resistive material in the two layers is arranged such that the actuator can be bent in two directions, both in the plane of the actuator and normal to the plane of the actuator.

REFERENCES:
patent: 4300350 (1981-11-01), Becker
patent: 4844117 (1989-07-01), Sung
patent: 5271597 (1993-12-01), Jerman
patent: 5318268 (1994-06-01), Cox et al.
patent: 5619177 (1997-04-01), Johnson et al.

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