Heat exchange – Regenerator – Checker brick structure
Patent
1991-06-28
1992-05-26
Davis, Jr., Albert W.
Heat exchange
Regenerator
Checker brick structure
165 805, 165 804, 165170, 361385, 324158F, H01L 2340
Patent
active
051158582
ABSTRACT:
A wafer cooling chuck (10) uses 3M micro-channel stock (12). A coolant manifold (14) surrounds ends (16) and (18) of the stock (12). A vacuum manifold (17) surrounds the coolant manifold (14) at end (16). A heat transfer fluid supply manifold (15) surrounds the coolant manifold (14) at end (18). A first set of alternate channels (22) of the stock (12) are connected to the coolant manifolds (14) at each end (16) and (18). A second set of alternate channels (24) are connected to the vacuum manifold (17) by apertures (25, 26) connected to them from top surface (28) of the stock (12). The apertures (26) are connected to every other one of the alternate channels (24) at end (16). A set of apertures (35) are connected to the same channels (24) as the apertures (26) at end (16). A second set of apertures (37) are connected to the same channels as the apertures (25) at end (18). In use of the wafer cooling chuck (10), a liquid coolant (33), such as chilled water, is circulated through the alternate channels (22) from the coolant manifold (14) at end (18) and to the coolant manifold (14) at end (16). A high heat transfer fluid (33), such as helium gas or a dielectric liquid, is introduced into every other one of the alternate channels (24) from the heat transfer fluid supply manifold (15) at end (16). A vacuum is pulled through the other alternate channels (24) through the vacuum manifold (17) at end (18). Wafer (50) is held against surface (28) of the stock (12) by the vacuum.
REFERENCES:
patent: 4268850 (1981-05-01), Lazarek et al.
patent: 4457359 (1984-07-01), Holden
patent: 4609037 (1986-09-01), Wheeler
patent: 4628991 (1986-12-01), Hsiao et al.
patent: 4671204 (1987-06-01), Ballou
Fitch John S.
Hamburgen William R.
Davis Jr. Albert W.
Digital Equipment Corporation
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