Micro-cantilever type probe card

Details Micro-cantilever type probe card Micro-cantilever type probe card

2005-10-18

2005-10-18

Pascal, Robert (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB, C324S758010

Reexamination Certificate

active

06956386

ABSTRACT:
A probe card has probe sections with silicon probes formed on an insulated circuit board that are connected by an adhesive on the supporting structures. The supporting structures are supported by fixing structures with each of the fixing structures being fixed on the circuit board. The probe card has the probe section's wiring and the circuit board's wiring being electrically connected by a metallic wiring and the sub printed circuit and the pogo pin electrically connected by an anisotropic conducting film with the sub printed circuit board and the pogo pin. A metallic layer is formed by the plating of the probe in the probe section. This reduces the manufacturing costs by enabling the damaged probes during manufacturing to be discarded and the others being used continually.

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patent: 10-0328540 (2002-11-01), None
patent: WO 02/15260 (2002-02-01), None

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