Micro-bridge structure

Details Micro-bridge structure Micro-bridge structure

2006-02-21

2006-02-21

Porta, David (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S332000, C250S338400

Reexamination Certificate

active

07002153

ABSTRACT:
A method of fabricating a micro-bridge device (14, 16) onto a substrate (20). The method includes the steps of: providing a sacrificial material (32) on a surface region of the substrate (20); patternwise etching the sacrificial material (32); providing a sensing material (34) on a surface region of the sacrificial material; providing a support material (36) on a surface region of the sensing material; and removing the sacrificial material (32) leaving support material (36) with the sensing material (34) on its lower surface, substantially free standing above the substrate (20).

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