Micro area analyzing method

Details Micro area analyzing method Micro area analyzing method

1995-03-29

1996-07-30

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 48, G01N 23223

Patent

active

055419739

ABSTRACT:
A method for analyzing a micro area in a micro area X-ray analyzing device which detects X-rays from a sample irradiated by a primary beam and analyzes the sample by analyzing spectra of the X-rays, which method includes selecting a combination of a plurality of stage positions in which an overlapped area of a plurality of primary beam spots nearly conforms with a predetermined analytical area, and calculating a common element of X-ray spectra acquired in the plural stage positions to obtain information on the predetermined analytical area and a background of the sample.

REFERENCES:
patent: 5062127 (1991-10-01), Sayama et al.
patent: 5422925 (1995-06-01), Komatsu et al.

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