Micro-analysis processes using X-rays

Details Micro-analysis processes using X-rays Micro-analysis processes using X-rays

1978-11-27

1980-08-19

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250397, H01J 3900

Patent

active

042186170

ABSTRACT:
A process and device for micro-analysis in which a thin layer of anticathode material is scanned by means of a pencil-beam of electrons. The X-rays formed are received by a thin layer of converter where they give rise to a current of photoelectrons which is subject to an intensity measurement by an analyser.
From the measurement of intensity of the photoelectrons are deduced the properties of the zone of the anticathode which receives the pencil-beam.

REFERENCES:
patent: 3760180 (1973-09-01), Weber
patent: 3783280 (1974-01-01), Watson
patent: 3866044 (1975-02-01), Grund

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