Micro-actuator, head gimbal assembly and manufacturing...

Details Micro-actuator, head gimbal assembly and manufacturing... Micro-actuator, head gimbal assembly and manufacturing...

2007-05-15

2007-05-15

Cao, Allen (Department: 2627)

Dynamic magnetic information storage or retrieval

Head mounting

For adjusting head position

Reexamination Certificate

active

10763327

ABSTRACT:
A head gimbal assembly comprising a slider having a read\write sensor; a suspension to load the slider; a micro-actuator; wherein the micro-actuator comprises a piezoelectric unit with two piezoelectric elements and a support base having a base to be coupled with the suspension physically, a moving plate to be coupled with the two piezoelectric elements, and a leading beam to connect with the base and the moving plate. Also disclosed is a micro-actuator comprising inter alia a piezoelectric unit with two piezoelectric elements. A method of forming a micro-actuator is also disclosed, which method comprising forming a piezoelectric unit having two piezoelectric elements; forming a support base having a base, a moving plate, and a leading beam to connect with the base and the moving plate; and bonding the piezoelectric unit to one side of the support base. Also disclosed is a method of forming a slider, a suspension and a micro-actuator.

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