Micro-actuator for hard drive utilizing insulating portions...

Details Micro-actuator for hard drive utilizing insulating portions... Micro-actuator for hard drive utilizing insulating portions...

2007-06-14

2008-12-09

Heinz, A. J. (Department: 2627)

Dynamic magnetic information storage or retrieval

Head mounting

For adjusting head position

C310S0400MM

Reexamination Certificate

active

07463454

ABSTRACT:
A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.

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European Search Report for EP 02 42 5407 dated Nov. 25, 2002.

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