Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2007-05-01
2007-05-01
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S510000
Reexamination Certificate
active
10974712
ABSTRACT:
A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.
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Ho Kye-Chyn
Lin Lung-Yung
Lo Yuan
Sche Schiu
Tsai Deng-Horng
Chapman John E.
Chung Shan Institute of Science and Technology
Neostones Micro Fabrication Corporation
Rabin & Berdo P.C.
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